Surface engineering with functional random copolymers for nanolithographic applications

Katia SPARNACCI; Diego Antonioli; Valentina GIANOTTI; Federico Ferrarese Lupi; Tommaso Jacopo Giammaria; Gabriele Seguini; Michele Perego; Michele LAUS

doi:10.1063/1.4949745

Surface engineering with functional random copolymers for nanolithographic applications

Katia SPARNACCI, Diego Antonioli, Valentina GIANOTTI, Federico Ferrarese Lupi, Tommaso Jacopo Giammaria, Gabriele Seguini, Michele Perego, Michele LAUS

Risultato della ricerca: Contributo su rivista › Articolo in rivista › peer review

Lingua originale	Inglese
pagine (da-a)	020170
Rivista	AIP Conference Proceedings
Volume	1736
DOI	https://doi.org/10.1063/1.4949745
Stato di pubblicazione	Pubblicato - 2016

Keywords

Molecular Weight
Rapid Thermal Processing
Self-Assembly
Physics and Astronomy (all)

Accesso al documento

10.1063/1.4949745

http://hdl.handle.net/11579/92503

Altri file e collegamenti

handle

Cita questo

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title = "Surface engineering with functional random copolymers for nanolithographic applications",

keywords = "Molecular Weight, Rapid Thermal Processing, Self-Assembly, Physics and Astronomy (all), Molecular Weight, Rapid Thermal Processing, Self-Assembly, Physics and Astronomy (all)",

author = "Katia SPARNACCI and Diego Antonioli and Valentina GIANOTTI and Lupi, {Federico Ferrarese} and Giammaria, {Tommaso Jacopo} and Gabriele Seguini and Michele Perego and Michele LAUS",

year = "2016",

doi = "10.1063/1.4949745",

language = "English",

volume = "1736",

pages = "020170",

journal = "AIP Conference Proceedings",

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publisher = "American Institute of Physics",

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T1 - Surface engineering with functional random copolymers for nanolithographic applications

AU - SPARNACCI, Katia

AU - Antonioli, Diego

AU - GIANOTTI, Valentina

AU - Lupi, Federico Ferrarese

AU - Giammaria, Tommaso Jacopo

AU - Seguini, Gabriele

AU - Perego, Michele

AU - LAUS, Michele

PY - 2016

Y1 - 2016

KW - Molecular Weight

KW - Rapid Thermal Processing

KW - Self-Assembly

KW - Physics and Astronomy (all)

KW - Molecular Weight

KW - Rapid Thermal Processing

KW - Self-Assembly

KW - Physics and Astronomy (all)

UR - https://iris.uniupo.it/handle/11579/92503

U2 - 10.1063/1.4949745

DO - 10.1063/1.4949745

M3 - Article

SN - 0094-243X

VL - 1736

SP - 020170

JO - AIP Conference Proceedings

JF - AIP Conference Proceedings

ER -