TY - GEN
T1 - Surface engineering with functional random copolymers for nanolithographic applications
AU - Sparnacci, Katia
AU - Antonioli, Diego
AU - Gianotti, Valentina
AU - Lupi, Federico Ferrarese
AU - Giammaria, Tommaso Jacopo
AU - Seguini, Gabriele
AU - Perego, Michele
AU - Laus, Michele
N1 - Publisher Copyright:
© 2016 Author(s).
PY - 2016/5/18
Y1 - 2016/5/18
N2 - Hydroxyl-terminated P(S-r-MMA) random copolymers with molecular weight ranging from 1.7 to 69 kg/mol and a styrene unit fraction of 61% were grafted onto a silicon oxide surface and subsequently used to study the orientation of domains with respect to the substrate, in cylinder-forming PS-b-PMMA block copolymer thin films. When the thickness (H) of the grafted layer is greater than 5-6 nm, a perpendicular orientation is always observed because of the efficient decoupling of the BCP film from the polar SiO2 surface. Conversely, if H is less than 5 nm, the critical thickness of the grafted layer, which allows the neutralization of the substrate and promotion of the perpendicular orientation of the nanodomains in the BCP film, is found to depend on the Mn of the RCP. In particular, when Mn = 1700, a 2.0 nm thick grafted layer is sufficient to promote the perpendicular orientation of the PMMA cylinders in the PS-b-PMMA BCP film.
AB - Hydroxyl-terminated P(S-r-MMA) random copolymers with molecular weight ranging from 1.7 to 69 kg/mol and a styrene unit fraction of 61% were grafted onto a silicon oxide surface and subsequently used to study the orientation of domains with respect to the substrate, in cylinder-forming PS-b-PMMA block copolymer thin films. When the thickness (H) of the grafted layer is greater than 5-6 nm, a perpendicular orientation is always observed because of the efficient decoupling of the BCP film from the polar SiO2 surface. Conversely, if H is less than 5 nm, the critical thickness of the grafted layer, which allows the neutralization of the substrate and promotion of the perpendicular orientation of the nanodomains in the BCP film, is found to depend on the Mn of the RCP. In particular, when Mn = 1700, a 2.0 nm thick grafted layer is sufficient to promote the perpendicular orientation of the PMMA cylinders in the PS-b-PMMA BCP film.
KW - Molecular Weight
KW - Rapid Thermal Processing
KW - Self-Assembly
UR - http://www.scopus.com/inward/record.url?scp=84984577388&partnerID=8YFLogxK
U2 - 10.1063/1.4949745
DO - 10.1063/1.4949745
M3 - Conference contribution
AN - SCOPUS:84984577388
T3 - AIP Conference Proceedings
BT - VIII International Conference on "Times of Polymers and Composites"
A2 - D'Amore, Alberto
A2 - Grassia, Luigi
A2 - Acierno, Domenico
PB - American Institute of Physics Inc.
T2 - 8th International Conference on Times of Polymers and Composites: From Aerospace to Nanotechnology
Y2 - 19 June 2016 through 23 June 2016
ER -