Surface engineering with functional random copolymers for nanolithographic applications

Katia SPARNACCI; Diego Antonioli; Valentina GIANOTTI; Federico Ferrarese Lupi; Tommaso Jacopo Giammaria; Gabriele Seguini; Michele Perego; Michele LAUS

doi:10.1063/1.4949745

Surface engineering with functional random copolymers for nanolithographic applications

Katia SPARNACCI, Diego Antonioli, Valentina GIANOTTI, Federico Ferrarese Lupi, Tommaso Jacopo Giammaria, Gabriele Seguini, Michele Perego, Michele LAUS

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	020170
Journal	AIP Conference Proceedings
Volume	1736
DOIs	https://doi.org/10.1063/1.4949745
Publication status	Published - 2016

Keywords

Molecular Weight
Rapid Thermal Processing
Self-Assembly
Physics and Astronomy (all)

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10.1063/1.4949745

http://hdl.handle.net/11579/92503

Cite this

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title = "Surface engineering with functional random copolymers for nanolithographic applications",

keywords = "Molecular Weight, Rapid Thermal Processing, Self-Assembly, Physics and Astronomy (all), Molecular Weight, Rapid Thermal Processing, Self-Assembly, Physics and Astronomy (all)",

author = "Katia SPARNACCI and Diego Antonioli and Valentina GIANOTTI and Lupi, {Federico Ferrarese} and Giammaria, {Tommaso Jacopo} and Gabriele Seguini and Michele Perego and Michele LAUS",

year = "2016",

doi = "10.1063/1.4949745",

language = "English",

volume = "1736",

pages = "020170",

journal = "AIP Conference Proceedings",

issn = "0094-243X",

publisher = "American Institute of Physics",

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T1 - Surface engineering with functional random copolymers for nanolithographic applications

AU - SPARNACCI, Katia

AU - Antonioli, Diego

AU - GIANOTTI, Valentina

AU - Lupi, Federico Ferrarese

AU - Giammaria, Tommaso Jacopo

AU - Seguini, Gabriele

AU - Perego, Michele

AU - LAUS, Michele

PY - 2016

Y1 - 2016

KW - Molecular Weight

KW - Rapid Thermal Processing

KW - Self-Assembly

KW - Physics and Astronomy (all)

KW - Molecular Weight

KW - Rapid Thermal Processing

KW - Self-Assembly

KW - Physics and Astronomy (all)

UR - https://iris.uniupo.it/handle/11579/92503

U2 - 10.1063/1.4949745

DO - 10.1063/1.4949745

M3 - Article

SN - 0094-243X

VL - 1736

SP - 020170

JO - AIP Conference Proceedings

JF - AIP Conference Proceedings

ER -

Surface engineering with functional random copolymers for nanolithographic applications

Keywords

Access to Document

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