Polymeric Deterministic Doping

An accurate control of the dose and the position of dopant atoms in semiconductive materials is strictly required in the production of transistors with dimensions of few nanometers and is then strongly requested by microelectronics industry. In this thesis a doping technology based on functionalized polymers is proposed. Several dopant polymers were synthesized by ATRP, NMP and Solid-Phase synthesis and tested as dopant system. Because the control of the amount of dopant atoms is performed by a "grafting to" approach, the mechanism of this reaction was investigated deep inside. A new mechanochemical model for the "grafting to" reaction was proposed in contrast with the classical one, based on diffusion.