Abstract
We designed, produced, and tested RSD (Resistive AC-Coupled Silicon Detectors) devices, an evolution of the standard LGAD (Low-Gain Avalanche Diode) technology where a resistive n-type implant and a coupling dielectric layer have been implemented. The first feature works as a resistive sheet, freezing the multiplied charges, while the second one acts as a capacitive coupling for readout pads. We succeeded in the challenging goal of obtaining very fine pitch (50, 100, and 200μm) while maintaining the signal waveforms suitable for high timing and 4D-tracking performances, as in the standard LGAD-based devices.
| Original language | English |
|---|---|
| Article number | 8846722 |
| Pages (from-to) | 1780-1783 |
| Number of pages | 4 |
| Journal | IEEE Electron Device Letters |
| Volume | 40 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - Nov 2019 |
Keywords
- 4D tracking
- AC-coupled readout
- LGAD
- RSD
- Silicon detectors
- avalanche charge multiplication
- timing
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