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Demonstration of 200-, 100-, and 50-μ m Pitch Resistive AC-Coupled Silicon Detectors (RSD) with 100% Fill-Factor for 4D Particle Tracking

  • Marco Mandurrino
  • , F. Siviero
  • , M. Tornago
  • , R. Arcidiacono
  • , M. Boscardin
  • , N. Cartiglia
  • , G. F. Dalla Betta
  • , M. Ferrero
  • , F. Ficorella
  • , L. Pancheri
  • , G. Paternoster

Research output: Contribution to journalArticlepeer-review

Abstract

We designed, produced, and tested RSD (Resistive AC-Coupled Silicon Detectors) devices, an evolution of the standard LGAD (Low-Gain Avalanche Diode) technology where a resistive n-type implant and a coupling dielectric layer have been implemented. The first feature works as a resistive sheet, freezing the multiplied charges, while the second one acts as a capacitive coupling for readout pads. We succeeded in the challenging goal of obtaining very fine pitch (50, 100, and 200μm) while maintaining the signal waveforms suitable for high timing and 4D-tracking performances, as in the standard LGAD-based devices.

Original languageEnglish
Article number8846722
Pages (from-to)1780-1783
Number of pages4
JournalIEEE Electron Device Letters
Volume40
Issue number11
DOIs
Publication statusPublished - Nov 2019

Keywords

  • 4D tracking
  • AC-coupled readout
  • LGAD
  • RSD
  • Silicon detectors
  • avalanche charge multiplication
  • timing

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