Project Details
Description
This project aims to develop a new type of dimensional standards for step height and lateral resolution measurements for scanning probe microscopy (SPM) and interference microscopy for instance. The design parameter will be tailored to the demands of stakeholders of semiconductor and nanotechnology industry as well as in biophysics and surface science. These standards will fill the gap at the nano- and subnanoscale, reflecting the ongoing shrinking process.
| Acronym | SIB61 CRYSTAL |
|---|---|
| Status | Active |
| Effective start/end date | 10/01/13 → … |
Funding
- European Commission
UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This project contributes towards the following SDG(s):
Fingerprint
Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.